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Industry Considerations in Determining Equipment Reliability

JC Greiner-1987-01-01
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TL;DRAbstract

Automation and Mechanization are essential to the future of our industry. The key to success is understanding not only the raw capability of each component of a system but also the capability of each component with human factors integrated. The SEMI Uptime Document (1) isolates and defines components of real factory time and formulates them in two distinct ways: with and without human interfacing. Part one, Equipment Dependent Uptime, has passed balloting and is nearing implementation as an official standard. The second, which will utilize the same components arranged in a manner to account for human interfacing, is being readied for initial balloting.

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Automation and Mechanization are essential to the future of our industry. The key to success is understanding not only the raw capability of each component of a system but also the capability of each component with human factors integrated. The SEMI Uptime Document (1) isolates and defines components of real factory time and formulates them in two distinct ways: with and without human interfacing. Part one, Equipment Dependent Uptime, has passed balloting and is nearing implementation as an official standard. The second, which will utilize the same components arranged in a manner to account for human interfacing, is being readied for initial balloting.

Keywords

Reliability (semiconductor)Reliability engineeringComputer scienceEngineeringPhysics

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