A production-compatible microelectronic test pattern for evaluating photomask misalignment
4PDF
TL;DRAbstract
The National Bureau of Standards' was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science
Chat with Paper
AI Agents for this Paper
The National Bureau of Standards' was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science
Keywords
PhotomaskMicroelectronicsProduction (economics)Test (biology)Computer scienceMaterials scienceNanotechnologyGeology
Chat
Click to start Chat