Electrical and mechanical properties of Ta-N-Cu nanocomposite thin films
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TL;DRAbstract
Sputtered tantalum nitride (TaN) thin films can be used as thin film resistors (TFRs), since these thin films have been proved to have a wide range of electrical resistivity ) ( which is around 400~3 10P 4
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Sputtered tantalum nitride (TaN) thin films can be used as thin film resistors (TFRs), since these thin films have been proved to have a wide range of electrical resistivity ) ( which is around 400~3 10P 4
Keywords
Thin filmTantalum nitrideMaterials scienceNanocompositeElectrical resistivity and conductivityTemperature coefficientSputteringComposite material
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