Journal
Vacuum
Elsevier BV. Metal and Thin Film Mechanics. 52,692 works and 307,880 citations indexed by CitedEvidence.
Works
52,692
Citations
307,880
H-index
133
ISSN
0042-207X
Open access
No
Impact
3.68
Research Topics
Metal and Thin Film MechanicsPlasma Diagnostics and ApplicationsSemiconductor materials and devicesIon-surface interactions and analysisElectron and X-Ray Spectroscopy TechniquesDiamond and Carbon-based Materials ResearchScientific Measurement and Uncertainty EvaluationVacuum and Plasma ArcsZnO doping and propertiesCopper Interconnects and Reliability