Journal
Shinku
The Vacuum Society of Japan. Metal and Thin Film Mechanics. 4,672 works and 4,168 citations indexed by CitedEvidence.
Works
4,672
Citations
4,168
H-index
15
ISSN
0559-8516
Open access
No
Impact
Not available
Research Topics
Metal and Thin Film MechanicsElectron and X-Ray Spectroscopy TechniquesSemiconductor materials and devicesPlasma Diagnostics and ApplicationsIon-surface interactions and analysisCopper Interconnects and ReliabilityScientific Measurement and Uncertainty EvaluationParticle accelerators and beam dynamicsDiamond and Carbon-based Materials ResearchAdvanced Materials Characterization Techniques