Dielectric charging in silicon nitride films for MEMS capacitive switches: Effect of film thickness and deposition conditions
2009 · Microelectronics Reliability · 68 citations
https://doi.org/10.1016/j.microrel.2009.07.006
F
Fabio Coccetti
IRT M2P(FR)
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170
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1.8K
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23
h-index
46
i10-index
Fabio Coccetti is an academic researcher from IRT M2P. The author has contributed to research in topics: Advanced MEMS and NEMS Technologies & Microwave Engineering and Waveguides & Acoustic Wave Resonator Technologies. The author has an h-index of 23, co-authored 145 publications.
Papers by this author
worksOn the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies
2011 · Microelectronics Reliability · 65 citations
https://doi.org/10.1016/j.microrel.2011.07.081
On the influence of environment gases, relative humidity and gas purification on dielectric charging/discharging processes in electrostatically driven MEMS/NEMS devices
2010 · Nanotechnology · 52 citations
https://doi.org/10.1088/0957-4484/22/3/035705
A systematic reliability investigation of the dielectric charging process in electrostatically actuated MEMS based on Kelvin probe force microscopy
2010 · Journal of Micromechanics and Microengineering · 36 citations
https://doi.org/10.1088/0960-1317/20/6/064016
Nanoscale characterization of different stiction mechanisms in electrostatically driven MEMS devices based on adhesion and friction measurements
2011 · Journal of Colloid and Interface Science · 26 citations
https://doi.org/10.1016/j.jcis.2011.03.005
Life expectancy and characterization of capacitive RF MEMS switches
2010 · Microelectronics Reliability · 22 citations
https://doi.org/10.1016/j.microrel.2010.07.064
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