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P. Pons

Centre National de la Recherche Scientifique(FR)

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372

Papers

3.0K

Citations

27

h-index

108

i10-index

P. Pons is an academic researcher from Centre National de la Recherche Scientifique. The author has contributed to research in topics: Advanced MEMS and NEMS Technologies & Acoustic Wave Resonator Technologies & Microwave Engineering and Waveguides. The author has an h-index of 27, co-authored 317 publications.

ORCID: 0000-0002-7989-3272

Research Topics

Advanced MEMS and NEMS Technologies Acoustic Wave Resonator Technologies Microwave Engineering and Waveguides Force Microscopy Techniques and Applications Mechanical and Optical Resonators

Papers by this author

works

Dielectric charging in silicon nitride films for MEMS capacitive switches: Effect of film thickness and deposition conditions

2009 · Microelectronics Reliability · 68 citations

https://doi.org/10.1016/j.microrel.2009.07.006

Usama Zaghloul G. Papaioannou Fabio Coccetti P. Pons

On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies

2011 · Microelectronics Reliability · 65 citations

https://doi.org/10.1016/j.microrel.2011.07.081

Usama Zaghloul G. Papaioannou Bharat Bhushan Fabio Coccetti

On the influence of environment gases, relative humidity and gas purification on dielectric charging/discharging processes in electrostatically driven MEMS/NEMS devices

2010 · Nanotechnology · 52 citations

https://doi.org/10.1088/0957-4484/22/3/035705

Usama Zaghloul Bharat Bhushan P. Pons G. Papaioannou

A systematic reliability investigation of the dielectric charging process in electrostatically actuated MEMS based on Kelvin probe force microscopy

2010 · Journal of Micromechanics and Microengineering · 36 citations

https://doi.org/10.1088/0960-1317/20/6/064016

Usama Zaghloul G. Papaioannou Fabio Coccetti P. Pons

A wireless passive RCS-based temperature sensor using liquid metal and microfluidics technologies

2011 · 31 citations

https://doi.org/10.23919/eumc.2011.6101891

Anya Traille Sofiene Bouaziz Stéphane Pinon P. Pons

Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques

2010 · Microelectronics Reliability · 31 citations

https://doi.org/10.1016/j.microrel.2010.07.027

Usama Zaghloul M. Koutsoureli H. Wang F. Coccetti

Research topics

topics

Advanced MEMS and NEMS Technologies

Acoustic Wave Resonator Technologies

Microwave Engineering and Waveguides

Force Microscopy Techniques and Applications

Mechanical and Optical Resonators

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