Nitrogen doped high selectivity amorphous carbon film for high aspect ratio etch process
2024 · Thin Solid Films · 4 citations
https://doi.org/10.1016/j.tsf.2024.140582
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52
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705
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15
h-index
19
i10-index
Se Jun Park is an academic researcher from Samsung (South Korea). The author has contributed to research in topics: Metal and Thin Film Mechanics & Diamond and Carbon-based Materials Research & Lubricants and Their Additives. The author has an h-index of 15, co-authored 45 publications.
ORCID: 0000-0001-5226-4049Click to start Chat