Nitrogen doped high selectivity amorphous carbon film for high aspect ratio etch process
2024 · Thin Solid Films · 4 citations
https://doi.org/10.1016/j.tsf.2024.140582
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10
h-index
10
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Song Yi Baek is an academic researcher from Samsung (South Korea). The author has contributed to research in topics: Hepatocellular Carcinoma Treatment and Prognosis & Advanced biosensing and bioanalysis techniques & Semiconductor materials and devices. The author has an h-index of 10, co-authored 23 publications.
ORCID: 0000-0002-0127-1895Click to start Chat