Approaching Defect-free Amorphous Silicon Nitride by Plasma-assisted Atomic Beam Deposition for High Performance Gate Dielectric
2016 · Scientific Reports · 27 citations
https://doi.org/10.1038/srep28326
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Ying‐Hsin Lu is an academic researcher.
https://doi.org/10.1038/srep28326
https://doi.org/10.1016/j.bj.2020.11.010
https://doi.org/10.1186/s11671-020-03373-2
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