Approaching Defect-free Amorphous Silicon Nitride by Plasma-assisted Atomic Beam Deposition for High Performance Gate Dielectric
2016 · Scientific Reports · 27 citations
https://doi.org/10.1038/srep28326
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Hung-Chun Lee is an academic researcher from National Cheng Kung University. The author has contributed to research in topics: Medical Image Segmentation Techniques & Supercapacitor Materials and Fabrication & Semiconductor materials and devices. The author has an h-index of 3, co-authored 3 publications.
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