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436

Papers

5.4K

Citations

41

h-index

147

i10-index

K. Satō is an academic researcher from Kitasato University. The author has contributed to research in topics: Advanced MEMS and NEMS Technologies & Advanced Surface Polishing Techniques & Semiconductor materials and devices. The author has an h-index of 41, co-authored 371 publications.

ORCID: 0000-0003-2252-2785

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