Design of bi-axial piezoelectric MEMS micro mirror with gimbal actuator for dynamic decoupling
2024 · Journal of Micromechanics and Microengineering · 6 citations
https://doi.org/10.1088/1361-6439/ad7a7e
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Chih-Chen Hsu is an academic researcher from National Tsing Hua University. The author has contributed to research in topics: Advanced MEMS and NEMS Technologies & Advanced Fiber Optic Sensors & Mechanical and Optical Resonators. The author has an h-index of 4, co-authored 4 publications.
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