A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams
2023 · Microsystems & Nanoengineering · 16 citations
https://doi.org/10.1038/s41378-023-00570-8
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Lei Xiao
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Lei Xiao is an academic researcher from Beijing Institute of Technology. The author has contributed to research in topics: Advanced Sensor and Energy Harvesting Materials & Gas Sensing Nanomaterials and Sensors & 3D IC and TSV technologies. The author has an h-index of 22, co-authored 73 publications.
ORCID: 0000-0002-7613-0907Papers by this author
worksAn ultra-deep TSV technique enabled by the dual catalysis-based electroless plating of combined barrier and seed layers
2024 · Microsystems & Nanoengineering · 15 citations
https://doi.org/10.1038/s41378-024-00713-5
Hybrid Learning Model for Cross-Device Fault Detection of Industrial Robot Joints
2025 · Journal of Shanghai Jiaotong University (Science) · 0 citations
https://doi.org/10.1007/s12204-025-2843-3
Multifunction for the high hardness ultra-thin fiberboard loaded with functional unit and by the in-situ synthesis of CaCO3 attached on the wood fiber
2025 · Industrial Crops and Products · 0 citations
https://doi.org/10.1016/j.indcrop.2025.122417
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