AlN/ScAlN composite films-based spurious free A1 mode lamb wave resonator with adjustable effective electromechanical coupling coefficient
2024 · Journal of Physics D Applied Physics · 0 citations
https://doi.org/10.1088/1361-6463/ad7150
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Xiyu Gu is an academic researcher. The author has contributed to research in topics: GaN-based semiconductor devices and materials & Advanced MEMS and NEMS Technologies & Acoustic Wave Resonator Technologies.
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