Yuta Arakawa

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Yuta Arakawa is an academic researcher.

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Photo e-beam switching and quantitative Vth metrology of nMOS/pMOS transistors

2026 · 0 citations

https://doi.org/10.1117/12.3090330

Daiki Sato Yuta Arakawa Kotaro Niimi Atsushi Koizumi

Charge suppression in SEM imaging using pulsed electron beam modulation from an NEA-InGaN semiconductor photocathode

2026 · 0 citations

https://doi.org/10.1117/12.3090560

Mitsunobu Yasuda Tomohiro Nishitani Yuta Arakawa Daiki Sato

Nondestructive depth metrology of high-aspect-ratio TSVs using yield controlled e-beaming (YCeB)

2026 · 0 citations

https://doi.org/10.1117/12.3090559

Daiki Sato Yuta Arakawa Kotaro Niimi Atsushi Koizumi

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