Direct growth of single-domain epitaxial AlN films on Si(111) by RF/DC magnetron sputtering
2025 · Japanese Journal of Applied Physics · 0 citations
https://doi.org/10.35848/1347-4065/adc21c
I
Itagaki Katsunori
Claim or correct this author profile
Claim this profile or suggest corrections to the name, affiliation, bio, photo, or paper titles. Approved changes appear as verified CitedEvidence overlays.
0
Papers
0
Citations
Itagaki Katsunori is an academic researcher.
Papers by this author
worksChat about Author
Papers
Chat
Click to start Chat