Direct Evidence of Electron Tunneling in the Ionization of Sputtered Atoms
1983 · Physical Review Letters · 227 citations
https://doi.org/10.1103/physrevlett.50.127
M
Ming L. Yu
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Ming L. Yu is an academic researcher from Utah Valley University. The author has contributed to research in topics: Ion-surface interactions and analysis & Semiconductor materials and devices & Electron and X-Ray Spectroscopy Techniques. The author has an h-index of 29, co-authored 74 publications.
Papers by this author
worksWork-Function Dependence of Negative-Ion Production during Sputtering
1978 · Physical Review Letters · 200 citations
https://doi.org/10.1103/physrevlett.40.574
Mechanisms of atomic ion emission during sputtering
1986 · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 185 citations
https://doi.org/10.1016/0168-583x(86)90135-7
Velocity Dependence of the Ionization Probability of Sputtered Atoms
1981 · Physical Review Letters · 170 citations
https://doi.org/10.1103/physrevlett.47.1325
Doping reaction of PH3 and B2H6 with Si(100)
1986 · Journal of Applied Physics · 139 citations
https://doi.org/10.1063/1.336708
Real-time study of oxygen reaction on Si(100)
1987 · Physical Review Letters · 95 citations
https://doi.org/10.1103/physrevlett.58.1691
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