One-step 3D shaping using a gray-tone mask for optical and microelectronic applications
1994 · Microelectronic Engineering · 118 citations
https://doi.org/10.1016/0167-9317(94)90193-7
J
J. M. Stauffer
Swiss Center for Electronics and Microtechnology (Switzerland)(CH)
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J. M. Stauffer is an academic researcher from Swiss Center for Electronics and Microtechnology (Switzerland). The author has contributed to research in topics: Photonic and Optical Devices & Semiconductor Lasers and Optical Devices & Optical Coatings and Gratings. The author has an h-index of 4, co-authored 8 publications.
Papers by this author
worksSpatial optical beam steering with an AlGaAs integrated phased array
1993 · Applied Optics · 63 citations
https://doi.org/10.1364/ao.32.003220
Electron beam writing of continuous resist profiles for optical applications
1992 · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 25 citations
https://doi.org/10.1116/1.586051
Multiple-quantum-well nonlinear waveguide grating device
1991 · Applied Physics Letters · 5 citations
https://doi.org/10.1063/1.106017
Electro-optic AlGaAs spatial light deflector/modulator based on a grating phased array
1991 · Applied Physics Letters · 3 citations
https://doi.org/10.1063/1.104759
Fabrication of optoelectronic devices on AlGaAs using electron beam lithography
1991 · Microelectronic Engineering · 3 citations
https://doi.org/10.1016/0167-9317(91)90075-o
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