Patterning highly ordered arrays of complex nanofeatures through EUV directed polarity switching of non chemically amplified photoresist
2016 · Scientific Reports · 11 citations
https://doi.org/10.1038/srep22664
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45
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15
h-index
21
i10-index
V. S. V. Satyanarayana is an academic researcher from International Institute of Information Technology. The author has contributed to research in topics: Synthesis and biological activity & Vehicle Dynamics and Control Systems & Vibration Control and Rheological Fluids. The author has an h-index of 15, co-authored 39 publications.
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