The thermalization of energetic atoms during the sputtering process
1984 · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 305 citations
https://doi.org/10.1116/1.572396
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155
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2.3K
Citations
24
h-index
65
i10-index
R.E. Somekh is an academic researcher. The author has contributed to research in topics: Physics of Superconductivity and Magnetism & Magnetic properties of thin films & Metal and Thin Film Mechanics. The author has an h-index of 24, co-authored 132 publications.
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