Application of the low dielectric methyl-silsesquiazane (MSZ) as a passivation layer on TFT-LCD
2006 · Thin Solid Films · 14 citations
https://doi.org/10.1016/j.tsf.2006.07.053
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Feng-Sheng Yeh is an academic researcher from National Tsing Hua University. The author has contributed to research in topics: Semiconductor materials and devices & Thin-Film Transistor Technologies & Copper Interconnects and Reliability. The author has an h-index of 3, co-authored 3 publications.
https://doi.org/10.1016/j.tsf.2006.07.053
https://doi.org/10.1016/j.tsf.2007.08.014
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