Application of the low dielectric methyl-silsesquiazane (MSZ) as a passivation layer on TFT-LCD
2006 · Thin Solid Films · 14 citations
https://doi.org/10.1016/j.tsf.2006.07.053
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Ta-Shan Chang is an academic researcher from National Sun Yat-sen University. The author has contributed to research in topics: Copper Interconnects and Reliability & Semiconductor materials and devices & Thin-Film Transistor Technologies. The author has an h-index of 4, co-authored 4 publications.
https://doi.org/10.1016/j.tsf.2006.07.053
https://doi.org/10.1016/j.tsf.2007.08.014
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