Layout simulation for directed self-assembly with chemo-epitaxy methodology
2024 · 1 citations
https://doi.org/10.1117/12.3010510
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55
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575
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14
h-index
16
i10-index
Yuansheng Ma is an academic researcher from Nankai University. The author has contributed to research in topics: Advancements in Photolithography Techniques & Block Copolymer Self-Assembly & Industrial Vision Systems and Defect Detection. The author has an h-index of 14, co-authored 47 publications.
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