AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering for SAW applications
2015 · Journal of Physics D Applied Physics · 48 citations
https://doi.org/10.1088/0022-3727/48/14/145307
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94
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682
Citations
14
h-index
18
i10-index
Quentin Simon is an academic researcher. The author has contributed to research in topics: Ferroelectric and Piezoelectric Materials & Microwave Dielectric Ceramics Synthesis & Acoustic Wave Resonator Technologies. The author has an h-index of 14, co-authored 80 publications.
ORCID: 0000-0002-3670-4654https://doi.org/10.1088/0022-3727/48/14/145307
https://doi.org/10.1038/srep26552
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