https://doi.org/10.1016/j.progsurf.2015.06.001
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Stefan Facsko
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Stefan Facsko is an academic researcher from Helmholtz-Zentrum Dresden-Rossendorf. The author has contributed to research in topics: Ion-surface interactions and analysis & Integrated Circuits and Semiconductor Failure Analysis & Diamond and Carbon-based Materials Research. The author has an h-index of 41, co-authored 156 publications.
ORCID: 0000-0003-3698-3793Papers by this author
worksHighly charged ion induced nanostructures at surfaces by strong electronic excitations
2015 · Progress in Surface Science · 39 citations
Nonlinear compositional and morphological evolution of ion irradiated GaSb prior to nanostructure formation
2020 · Scientific Reports · 7 citations
https://doi.org/10.1038/s41598-020-64971-9
Clean Up Behind You ‐ Novel Patterning Approach for Solid Immersion Lenses
2026 · Advanced Functional Materials · 0 citations
https://doi.org/10.1002/adfm.202531985
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