Influence of the oxidation in the metal silicide/Si3N4 interfaces on the etching profile
2004 · Microelectronic Engineering · 0 citations
https://doi.org/10.1016/j.mee.2004.07.068
Claim or correct this author profile
Claim this profile or suggest corrections to the name, affiliation, bio, photo, or paper titles. Approved changes appear as verified CitedEvidence overlays.
7
Papers
71
Citations
4
h-index
3
i10-index
H. S. Kim is an academic researcher from Sun Moon University. The author has contributed to research in topics: Advancements in Photolithography Techniques & Integrated Circuits and Semiconductor Failure Analysis & Chaos control and synchronization. The author has an h-index of 4, co-authored 6 publications.
Click to start Chat