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A. Blattner

Intel (United States)(US)

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2

Papers

799

Citations

2

h-index

2

i10-index

A. Blattner is an academic researcher from Intel (United States). The author has contributed to research in topics: Semiconductor materials and devices & Advancements in Semiconductor Devices and Circuit Design & Advancements in Photolithography Techniques. The author has an h-index of 2, co-authored 2 publications.

Research Topics

Semiconductor materials and devices Advancements in Semiconductor Devices and Circuit Design Advancements in Photolithography Techniques Copper Interconnects and Reliability Ferroelectric and Negative Capacitance Devices

Papers by this author

works

A 22nm high performance and low-power CMOS technology featuring fully-depleted tri-gate transistors, self-aligned contacts and high density MIM capacitors

2012 · 749 citations

https://doi.org/10.1109/vlsit.2012.6242496

C. Auth C. Allen A. Blattner D. Bergstrom

Research topics

topics

Semiconductor materials and devices

Advancements in Semiconductor Devices and Circuit Design

Advancements in Photolithography Techniques

Copper Interconnects and Reliability

Ferroelectric and Negative Capacitance Devices

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