Microsphere-assisted, nanospot, non-destructive metrology for semiconductor devices
2022 · Light Science & Applications · 61 citations
https://doi.org/10.1038/s41377-022-00720-z
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5
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83
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3
h-index
2
i10-index
Jangryul Park is an academic researcher from Samsung (South Korea). The author has contributed to research in topics: Near-Field Optical Microscopy & Optical Coatings and Gratings & Integrated Circuits and Semiconductor Failure Analysis. The author has an h-index of 3, co-authored 5 publications.
https://doi.org/10.1038/s41377-022-00720-z
https://doi.org/10.1117/12.3025804
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