Heterostructure-based devices with enhanced humidity stability for H2 gas sensing applications in breath tests and portable batteries
2021 · Sensors and Actuators A Physical · 39 citations
https://doi.org/10.1016/j.sna.2021.112804
M
Mani Teja Bodduluri
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9
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9
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Mani Teja Bodduluri is an academic researcher from Fraunhofer Institute for Silicon Technology. The author has contributed to research in topics: Gas Sensing Nanomaterials and Sensors & Acoustic Wave Resonator Technologies & ZnO doping and properties. The author has an h-index of 9, co-authored 18 publications.
ORCID: 0000-0001-5844-5641Papers by this author
worksWafer-level chip-scale packaging of MEMS environmental sensors by functionalized porous PowderMEMS<sup>®</sup> micro-filters
2025 · Journal of Micromechanics and Microengineering · 3 citations
https://doi.org/10.1088/1361-6439/ada61e
Performance of magnetically driven MEMS piezoelectric energy harvester and its application as a transducer for a near zero-power wake-up
2021 · Fraunhofer-Publica (Fraunhofer-Gesellschaft) · 0 citations
PowderMEMS - Generic Integration of Functional Three-Dimensional Microstructures on Wafer Level
2023 · Fraunhofer-Publica (Fraunhofer-Gesellschaft) · 0 citations
Sputtered FeCoB Soft Magnetic Thin Films for Surface Acoustic Wave Sensors
2023 · Fraunhofer-Publica (Fraunhofer-Gesellschaft) · 0 citations
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