Xiaoyuan Qi

Xiaoyuan Qi

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Xiaoyuan Qi is an academic researcher.

ORCID: 0000-0002-9970-4037

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An artificial intelligence machine learning (AI/ML) approach with cross-technology node learning for multi-layer process defect predictions

2024 · 3 citations

https://doi.org/10.1117/12.3011296

Jonathan Ho Xiaoyuan Qi Fan Jiang Yuyang Sun

Monotonic machine learning (MML) for curvilinear OPC retargeting in NA0.33 EUV single-patterning 28nm metal pitch curvilinear logic technology

2026 · 0 citations

https://doi.org/10.1117/12.3091845

Hongming Zhang Renyang Meng Yuansheng Ma Vincent Yin

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