Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering
2022 · Acta Materialia · 44 citations
https://doi.org/10.1016/j.actamat.2022.118220
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Maria Gabriela Sales is an academic researcher from United States Naval Research Laboratory. The author has contributed to research in topics: 2D Materials and Applications & MXene and MAX Phase Materials & Semiconductor materials and devices. The author has an h-index of 11, co-authored 23 publications.
ORCID: 0000-0002-8724-4619https://doi.org/10.1016/j.actamat.2022.118220
https://doi.org/10.1038/s41699-019-0095-5
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