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Synthesis of low-k porous silica films via freeze drying
Article
10.1023/a:1006775213914
Synthesis of low-k porous silica films via freeze drying
Suk Hyun
,
Taewoo Kim
,
G. S. Kim
,
Hyung‐Ho Park
-
2000-10-01
-
Journal of Materials Science Letters
16
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Keywords
Materials science
Mineralogy
Chemistry
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