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Nanoorganization and device fabrication (carbon nanotubes) by vertical Porous Anodic Alumina Templates

B. Marquardt-2009-12-17-INRIA a CCSD electronic archive server
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TL;DRAbstract

This thesis is devoted to the study of vertical Pourous Anodic Alumina templates (PAA) and the application thereof for nanoorganization and device fabrication. Our principle objective was to develop an anodization method of Al that allows a reproducible fabrication of PAA offering the possibility to create complex porous nanostructures as well as the organization of nanomaterials. The PAA fabrication, i.e. the anodization process, has been studied in detail on various substrates on which initially an Al layer has been deposited. We have been able to control the fabrication rate of PAA precisely. PAAs have been fabricated using highly acidic anodization acids at low temperature, by which pore diameters down to 4.2 nm and pore densities up to 7.2*1011cm-² could be obtained. Further, we have developed a unique approach to control the barrier layer at the pore bottom of PAA applying an exponential anodization voltage decrease. This allows to vary and to control precisely the thickness of t

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This thesis is devoted to the study of vertical Pourous Anodic Alumina templates (PAA) and the application thereof for nanoorganization and device fabrication. Our principle objective was to develop an anodization method of Al that allows a reproducible fabrication of PAA offering the possibility to create complex porous nanostructures as well as the organization of nanomaterials. The PAA fabrication, i.e. the anodization process, has been studied in detail on various substrates on which initially an Al layer has been deposited. We have been able to control the fabrication rate of PAA precisely. PAAs have been fabricated using highly acidic anodization acids at low temperature, by which pore diameters down to 4.2 nm and pore densities up to 7.2*1011cm-² could be obtained. Further, we have developed a unique approach to control the barrier layer at the pore bottom of PAA applying an exponential anodization voltage decrease. This allows to vary and to control precisely the thickness of t

Keywords

FabricationAnodizingMaterials scienceNanotechnologyPorosityBarrier layerLayer (electronics)Nanomaterials

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