Book Chapter10.1016/s0080-8784(08)62931-2

Chapter 4 Halide and Chloride Transport Vapor-Phase Deposition of InGaAsP and GaAs

G. Beuchet-1985-01-01-Semiconductors and semimetals

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Keywords

Vapor phaseEpitaxyChemical vapor depositionImpurityHalidePhase (matter)Materials scienceSimple (philosophy)

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