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Open AccessArticle10.5162/imcs2012/p1.0.4

P1.0.4 Enhanced Room Temperature Response of SnO2 Thin Film Sensor Loaded with Pd Catalyst Clusters Under UV Radiation for Methane

Divya Haridas,Keshav Mahavidyalaya,Vinay Gupta-2012-01-01-Proceedings IMCS 2012

TL;DRAbstract

Room temperature response characteristics of SnO 2 thin film sensors loaded with palladium catalyst clusters of varying thickness are investigated for methane under the exposure of ultraviolet radiation. The SnO 2 -Pd cluster sensor structures have been prepared using rf sputtering. Combined effect of UV radiation exposure (wavelength=365 nm) and presence of Pd catalyst clusters (10 nm thick) on SnO 2 thin film sensor surface is seen to lead to an enhanced sensing response (252.3) for the detection of methane (200 ppm) at room temperature which is similar (158) to that obtained without UV illumination at elevated temperature of 220 o C. Obtained results are encouraging for commercial realization of room temperature SnO 2 based thin film sensor for CH 4 gas with enhanced response.

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Room temperature response characteristics of SnO 2 thin film sensors loaded with palladium catalyst clusters of varying thickness are investigated for methane under the exposure of ultraviolet radiation. The SnO 2 -Pd cluster sensor structures have been prepared using rf sputtering. Combined effect of UV radiation exposure (wavelength=365 nm) and presence of Pd catalyst clusters (10 nm thick) on SnO 2 thin film sensor surface is seen to lead to an enhanced sensing response (252.3) for the detection of methane (200 ppm) at room temperature which is similar (158) to that obtained without UV illumination at elevated temperature of 220 o C. Obtained results are encouraging for commercial realization of room temperature SnO 2 based thin film sensor for CH 4 gas with enhanced response.

Keywords

Thin filmMaterials scienceMethaneOptoelectronicsIrradiationUltravioletSputteringCatalysis

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