制限反応スパッタ法によるゲート絶縁膜用ZrO_2薄膜のアニール効果の検討(薄膜プロセス・材料,一般)
2009 · Combinatorial Pattern Matching · 0 citations
https://doi.org/10.1021/acs.est.3c05156
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公洋 佐々木
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公洋 佐々木 is an academic researcher.
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