超精细平坦化 互连层金属和芯片结构中的其他材料性质差异较大

超

超精细平坦化互连层金属和芯片结构中的其他材料性质差异较大

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超精细平坦化互连层金属和芯片结构中的其他材料性质差异较大 is an academic researcher from Shanghai Jiao Tong University. The author has contributed to research in topics: Manufacturing Process and Optimization & Advanced Surface Polishing Techniques.