Welcome Comments Help The mechanism of sputter-induced epitaxy modification
1997 · 0 citations
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K. L. Merkle is an academic researcher from Argonne National Laboratory. The author has contributed to research in topics: Physics of Superconductivity and Magnetism & Ion-surface interactions and analysis & Integrated Circuits and Semiconductor Failure Analysis. The author has an h-index of 34, co-authored 182 publications.
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