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Eiichirou Uda

Toshiba (Japan)(JP)

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4

Papers

79

Citations

4

h-index

3

i10-index

Eiichirou Uda is an academic researcher from Toshiba (Japan). The author has contributed to research in topics: Semiconductor materials and devices & Plasma Diagnostics and Applications & Copper Interconnects and Reliability. The author has an h-index of 4, co-authored 4 publications.

Research Topics

Semiconductor materials and devicesPlasma Diagnostics and ApplicationsCopper Interconnects and ReliabilityGaN-based semiconductor devices and materialsMetal and Thin Film Mechanics

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